1、主要测试内容
VCSEL 、PD 、光通讯 VCSEL、Micro LED 晶圆检测、卷板测试、定制化光学测试、定制化测试软件
2、丰富的样品测试类型
Wafer、Die、Chip、Packaged、Panel
3、自动化柔性配置
半自动、全自动
4、丰富的自动化上下料选件
Wafer with Gel-Pak、Wafer with Board、Wafer with Board (Small)
主要测试内容VCSEL /PD/光通讯 VCSEL/Micro LED 晶圆检测/卷板测试/定制化光学测试/定制化测试软件
n Material Handling Capability |
Wafer Size | 4” ~ 8” (before cutting) |
Die Size | 6 mil x 6 mil ~ 40 mil x 40 mil |
n Programmable XYZT Stage Movement |
X Axis | |
Travel | 230 mm |
Resolution | 0.4 mm |
Repeatability | ≤ 8 mm |
Y Axis | |
Travel | 230 mm |
Resolution | 0.5 mm |
Repeatability | ≤ 8 mm |
Z Axis | |
Travel | 10 mm |
Resolution | 0.1 mm |
Repeatability | ≤ 3 mm |
Theta Axis | |
Travel | ±7.5º |
Resolution | 0.0004º |
n Platen System |
Mechanism | Cantilever Probe Card (CPC) | DC Probe with Positioner |
Max. Configuration Qty. | 1 set | 2 sets / 4 sets |
Mounting Method | Mechanical screw | Magnetic |
n Chuck System |
Temperature Range | 20°C ~ 200°C |
Available Types | Co-axial / Tri-axial / Thermal Chuck |
Size | Up to 8” |
Material | Aluminum plated nickel / golden |
Vacuum type | Multi hole |
Vacuum count | Up to 4 sections |
n Optics and Vision Movement |
Optical System SX Movement | |
Travel | 310 mm |
Resolution | 0.5 mm |
Repeatability | ≤ 8 mm |
Parallelism with Table X | ≤ 5 mm |
Prober Vision SY Movement | |
Travel | 14 mm |
Resolution | 0.1 mm |
Repeatability | ≤ 4 mm |
Prober Vision SZ Movement | |
Travel | 150 mm |
Resolution | 0.5 mm |
Repeatability | ≤ 8 mm |
Optical Instruments SZ Movement | |
Travel | 150 mm |
Resolution | 0.5 mm |
Repeatability | ≤ 8 mm |
n Vision Alignment System |
CCD Camera | B/W 2590 x 1942 pixels |
Lens Options | Standard | Optional |
Tube Lens | 0.65x | 0.65x |
Objective Lens | 2x | 10x |
Total Magnification | 1.3x | 6.5x |
Field of View (mm) | 4.4 x 3.3 | 0.88 x 0.66 |
Lighting Source | White co-axial light | |
n General Specifications |
Physical Dimensions | |
Dimensions (WxDxH)1 | 870mm x 1200mm x 2114mm (34.3 in. x 47.2 in. x 83.2 in.) |
Weight | 1200 kg (2646 lb) |
Facility Requirement | |
Power Supply | Single phase, AC 220V, 50/60 Hz, 10 Amps, 600VA |
Vacuum | < -70 kpa @ 10 LPM flow rate |
CDA for Vibration- Isolation Table | 4~6 kg/cm2 @ 80 LPM flow rate (Ø 6mm) |
CDA for Processing | 4~6 kg/cm2 @ 10 LPM flow rate (Ø 6mm) |
Control System | |
Base | Granite base and gantry structure combined with a passive anti-vibration damping system, shielded enclosure, and feet |
Main System | Industrial PC-based system |
Operating System | Windows 11 (64-bit) |
LAN Port | Three (on the rear panel) |
Display Monitor | 22-inch x two |
Operating Interface | Control console with keyboard, mouse, two USB 3.0 type A ports integrated into keyboard tray |
Operation mode | Operator / Engineer / Administrator |
n General Specifications (Cont’d) |
Tester Interface | |
Connecting Interface | TCP / IP |
Bin Grade Number | Pass / Fail |
Operating Interface | |
Basic Operation Mode | Operator / Engineer / Administrator |
Advanced Operation2 | NG chip re-test |
Probing Mode | Full test / Sampling test2 |
Optional Accessories | |
Thermal Chuck | 1 set |
Manipulator | Up to 4 sets |
Edge Sensor3 | Up to 4 sets |
Ink Actuator | Up to 2 sets |
Probe Card Holder3 | 1 set |
Dockable Loader System | Up to two probe stations per loader (2P1L) |
Environmental Requirement | |
Operating Environment | Use in a clean environment to avoid temperature variations, humidity and dust |
Operating Range | 19°C ~ 24°C |
Target Temperature | 22°C |
Temperature Variation | 1K |
Humidity | 25% ~ 60% |
Cleanroom Standard | Class 10,000 |
Vibration Level | VC-C |
