1、多种用途配置选项
大批量生产的高速分选机
高性价比机型
2、柔性结构和分选设计
4”~8” 晶圆处理能力
MPI 独特的 PnP 装置
可编程 PnP 力 (15g~100g)
可选巡检功能
DUT 类型: LED / LD / IC and more
ST800 全自动分选机，具备高度自动化功能，采用先进工艺技术，以模块化架构设计，能精准满足各类客户需求，实现高速、高精度分选 。
AVIOR ST800-Q Fully Auto Die Sorter | ||
System capability | ||
Cycle time1 | 180 ms / per die | |
XY placement | ± 38 mm (± 1.5 mil) | |
Die rotation | ± 3° | |
Bin exchange time | 24 sec. | |
Material handling capability | ||
Die size | □ 0.15 mm ~ □ 10 mm | |
Thickness | 60~300 mm | |
Wafer size max. | 8” | |
Grip ring | GR 4 / 5 / 6 / 8 | |
Disco ring | 2-6, 2-6-1, 2-8, 2-8-1 | |
Pick & place system | ||
PnP arm qty. | 4 | |
Collect method | Surface contact | |
Bond force | 15g to 100g | |
Ejector | ||
Needle diameter | Ø 0.7 mm | |
Needle length | 17 mm | |
Z axis travel range | 1 mm | |
Ring table (RT) input station | ||
Pick area | GR4: Ø 106 mm GR5: Ø 135 mm GR6: Ø 156 mm GR8: Ø 196 mm DISCO 2-6-1: Ø 156 mm DISCO 2-8-1: Ø 205 mm | |
XY resolution | 1 mm | |
Bin table (BT) output station | ||
Bin area max. | GR4: Ø 100 mm GR5: Ø 135 mm GR6: Ø 155 mm GR8: Ø 195 mm DISCO 2-6-1: Ø 155 mm DISCO 2-8-1: Ø 205 mm | |
XY resolution | 1 mm | |
Bin frame size | 2-6-1, 2-8-1, GR 4/5/6/8 | |
Bin frame max. | GR type:48 (empty bin: 8 / full bin: 8 / buffer bin: 32)
DISCO type:150 (empty bin: 25 / full bin: 25 / buffer bin: 100) | |
Loader system | ||
Wafer cassette max. and type | 2 (for GR4/5/6/8 and DISCO) | |
Bin cassette max. | 6 | |
Total cassette qty. | 8 | |
Pattern recognition system | ||
Camera | 256 grey levels | |
Resolution (top side) | 1280 x 1024 px (RT/BT) | |
Resolution (back side) | 2448 x 2048 px (BSI station) | |
Search angle range | ± 15° | |
Vision system | ||
Camera | RT/BT: USB 3.0 CMOS (Mono) BSI: USB 3.0 CMOS (Mono) | |
Lens | RT/BT: 0.7x ~ 4.5x BSI station: 2x | |
Light source | Co-axial / ring / lateral light | |
Control system | ||
CPU | Intel® core™4 quad processor | |
OCR | OCR reader / 2D code reader | |
Main system / OS | IPC / Win.10 (64-bit) | |
Display interface | 22” TFT-LCD monitor | |
Operating interface | PC keyboard and mouse | |
Operating mode | Operator / engineer / admin. | |
HDD | 1TB | |
Physical specifications | ||
Dimensions2 | 1710 x 1140 x 1835 mm 67.3 x 44.8 x 72.2 in | |
Weight | 1400kg / 3086 lbs | |
Facility requirement | ||
Power input | 110 / 220 VAC, single phase, 16 amps, 50/60 Hz | |
Power consumption | 975 VA | |
Vacuum | 0.9 kg/cm2 @ 10 LPM flow rate (min.) | |
Clean dry air (CDA) | 6kg/cm2 @ 2 LPM flow rate | |
Temperature | ||
Operating range | 19oC ~ 24oC | |
Target temperature | 22oC | |
Temperature variation | 1K | |
Humidity | ||
Tool area | 25% ~ 60% | |
Support equipment area | 25% ~ 60% | |
Cleanroom standard | ||
Cleanroom class | Class 10000 | |
Vibration level | ||
Vibration | For proper operation of the sorter system, the environment should not exceed vibrations of ISO Operating Theatre Level | |
Warranty | ||
Warranty Period | One (1) year starting from the date of delivery | |